Product

Descum equipment

PSK Holdings' ECOLITE series offer descum and surface treatment for wafer-level or panel-level semiconductor packaging process. Descum is a process to remove scum after lithography, and it is essential to guarantee good profile of RDL pattern and bump shape. Surface treatment is applied to remove residue or metallic ion at pre-film coating and post RDL etch. It allows adhesion improvement of coated film with changing surface roughness and hydrophilic property of base layer.

Product line up
  • Product specification
  • High productivity
  • High reliability & low CoO
  • Dual plasma source
  • Small footprint
  • 8 inch & 6,4,2 inch available w/conversion kit
  • Product specification
  • Highest productivity in ECOLITE series
  • High reliability & low CoO
  • Dual plasma source
  • Small footprint
  • 12 inch & 8 inch available w/conversion kit
  • Provide warpage solution for FOWLP
  • Product specification
  • High reliability & low CoO
  • Dual plasma source
  • Small footprint
  • Ring frame available at ECOLITE II 300 & 400
  • Product specification
  • High reliability & low CoO
  • Single plasma source (RF bias)
  • Small footprint
  • Tray wafer chips available
  • Product specification
  • High reliability & low CoO
  • Single plasma source (RF bias)
  • Small footprint
  • Tray PCB available
  • Product specification
  • High productivity
  • High reliability & low CoO
  • Single plasma source (PE or RIE)
  • Customized panel size available (415x510~600x600mm)
  • Provide warpage solution for FOPLP