HDW series by PSK Holdings provide hot DI water to clean silicon wafer, liquid glass board, harddisk board using hallogen lamp heater with ≥5000hr life time. They have excellent clean class using PFA, PTFE, PVDF and pure quartz glass which contact DI water directly. Equipments perform 96% or more thermal efficiency and dramatic rapid heating up time with hallogen lamp heater. Safety interlock is designed to countermeasure overheat, leak, heater shartage, power failure, and earthquake.